1/19/2012	8:23:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2012	8:23:53 AM	Recipe started at 8:23 AM
1/19/2012	8:23:53 AM	Helium valve closed
1/19/2012	8:23:53 AM	H2 valve closed
1/19/2012	8:23:53 AM	BCl3 valve closed
1/19/2012	8:23:53 AM	PH3 valve closed
1/19/2012	8:23:53 AM	SiCl4 pre valve closed
1/19/2012	8:23:53 AM	SiCl4 post valve closed
1/19/2012	8:23:53 AM	Main Vac valve closed
1/19/2012	8:23:53 AM	Bypass valve closed
1/19/2012	8:23:53 AM	Bubbler valve closed
1/19/2012	8:23:53 AM	Helium MFC set to  0.000000
1/19/2012	8:23:53 AM	H2 MFC set to  0.000000
1/19/2012	8:23:53 AM	BCl3 MFC set to  0.000000
1/19/2012	8:23:53 AM	PH3 MFC set to  0.000000
1/19/2012	8:23:53 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:23:53 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:23:54 AM	Tube furnace set to 0
1/19/2012	8:23:57 AM	H2 valve closed
1/19/2012	8:23:57 AM	BCl3 valve closed
1/19/2012	8:23:57 AM	PH3 valve closed
1/19/2012	8:23:57 AM	SiCl4 pre valve closed
1/19/2012	8:23:57 AM	SiCl4 post valve closed
1/19/2012	8:23:57 AM	Main Vac valve closed
1/19/2012	8:23:57 AM	Bypass valve closed
1/19/2012	8:23:57 AM	Bubbler valve closed
1/19/2012	8:23:57 AM	Helium valve opened
1/19/2012	8:23:57 AM	Helium MFC set to  500.000000
1/19/2012	8:23:57 AM	H2 MFC set to  0.000000
1/19/2012	8:23:57 AM	BCl3 MFC set to  0.000000
1/19/2012	8:23:57 AM	PH3 MFC set to  0.000000
1/19/2012	8:23:57 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:23:57 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:23:57 AM	Tube furnace set to 0
1/19/2012	8:25:02 AM	Helium valve closed
1/19/2012	8:25:02 AM	H2 valve closed
1/19/2012	8:25:02 AM	BCl3 valve closed
1/19/2012	8:25:02 AM	PH3 valve closed
1/19/2012	8:25:02 AM	SiCl4 pre valve closed
1/19/2012	8:25:02 AM	SiCl4 post valve closed
1/19/2012	8:25:02 AM	Main Vac valve closed
1/19/2012	8:25:02 AM	Bypass valve closed
1/19/2012	8:25:02 AM	Bubbler valve closed
1/19/2012	8:25:02 AM	Helium MFC set to  0.000000
1/19/2012	8:25:02 AM	H2 MFC set to  0.000000
1/19/2012	8:25:02 AM	BCl3 MFC set to  0.000000
1/19/2012	8:25:02 AM	PH3 MFC set to  0.000000
1/19/2012	8:25:02 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:25:02 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:25:02 AM	Tube furnace set to 0
1/19/2012	8:25:03 AM	Run finished at 8:25 AM
1/19/2012	8:25:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2012	8:29:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/19/2012	8:29:34 AM	Recipe started at 8:29 AM
1/19/2012	8:29:34 AM	Helium valve closed
1/19/2012	8:29:34 AM	H2 valve closed
1/19/2012	8:29:34 AM	BCl3 valve closed
1/19/2012	8:29:34 AM	PH3 valve closed
1/19/2012	8:29:34 AM	SiCl4 pre valve closed
1/19/2012	8:29:34 AM	SiCl4 post valve closed
1/19/2012	8:29:34 AM	Main Vac valve closed
1/19/2012	8:29:34 AM	Bubbler valve closed
1/19/2012	8:29:34 AM	Bypass valve opened
1/19/2012	8:29:34 AM	Helium MFC set to  0.000000
1/19/2012	8:29:34 AM	H2 MFC set to  0.000000
1/19/2012	8:29:34 AM	BCl3 MFC set to  0.000000
1/19/2012	8:29:34 AM	PH3 MFC set to  0.000000
1/19/2012	8:29:34 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:29:34 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:29:34 AM	Tube furnace set to 0
1/19/2012	8:29:43 AM	Run aborted at 8:29 AM
1/19/2012	8:29:43 AM	Helium valve closed
1/19/2012	8:29:43 AM	H2 valve closed
1/19/2012	8:29:43 AM	BCl3 valve closed
1/19/2012	8:29:43 AM	PH3 valve closed
1/19/2012	8:29:43 AM	SiCl4 pre valve closed
1/19/2012	8:29:43 AM	SiCl4 post valve closed
1/19/2012	8:29:43 AM	Bypass valve closed
1/19/2012	8:29:43 AM	Main Vac valve closed
1/19/2012	8:29:43 AM	Bubbler valve closed
1/19/2012	8:29:43 AM	Helium MFC set to  0.000000
1/19/2012	8:29:43 AM	H2 MFC set to  0.000000
1/19/2012	8:29:43 AM	BCl3 MFC set to  0.000000
1/19/2012	8:29:43 AM	PH3 MFC set to  0.000000
1/19/2012	8:29:43 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:29:43 AM	Tube furnace set to 0
1/19/2012	8:29:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/19/2012	8:29:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2012	8:29:47 AM	Recipe started at 8:29 AM
1/19/2012	8:29:47 AM	Helium valve closed
1/19/2012	8:29:47 AM	H2 valve closed
1/19/2012	8:29:47 AM	BCl3 valve closed
1/19/2012	8:29:47 AM	PH3 valve closed
1/19/2012	8:29:47 AM	SiCl4 pre valve closed
1/19/2012	8:29:47 AM	SiCl4 post valve closed
1/19/2012	8:29:47 AM	Main Vac valve closed
1/19/2012	8:29:47 AM	Bubbler valve closed
1/19/2012	8:29:47 AM	Bypass valve opened
1/19/2012	8:29:47 AM	Helium MFC set to  0.000000
1/19/2012	8:29:47 AM	H2 MFC set to  0.000000
1/19/2012	8:29:47 AM	BCl3 MFC set to  0.000000
1/19/2012	8:29:47 AM	PH3 MFC set to  0.000000
1/19/2012	8:29:47 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:29:47 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:29:47 AM	Tube furnace set to 0
1/19/2012	8:30:04 AM	Run aborted at 8:30 AM
1/19/2012	8:30:04 AM	Helium valve closed
1/19/2012	8:30:04 AM	H2 valve closed
1/19/2012	8:30:04 AM	BCl3 valve closed
1/19/2012	8:30:04 AM	PH3 valve closed
1/19/2012	8:30:04 AM	SiCl4 pre valve closed
1/19/2012	8:30:04 AM	SiCl4 post valve closed
1/19/2012	8:30:04 AM	Bypass valve closed
1/19/2012	8:30:04 AM	Main Vac valve closed
1/19/2012	8:30:04 AM	Bubbler valve closed
1/19/2012	8:30:04 AM	Helium MFC set to  0.000000
1/19/2012	8:30:04 AM	H2 MFC set to  0.000000
1/19/2012	8:30:04 AM	BCl3 MFC set to  0.000000
1/19/2012	8:30:04 AM	PH3 MFC set to  0.000000
1/19/2012	8:30:04 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:30:04 AM	Tube furnace set to 0
1/19/2012	8:30:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2012	8:30:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2012	8:30:33 AM	Recipe started at 8:30 AM
1/19/2012	8:30:33 AM	Helium valve closed
1/19/2012	8:30:33 AM	H2 valve closed
1/19/2012	8:30:33 AM	BCl3 valve closed
1/19/2012	8:30:33 AM	PH3 valve closed
1/19/2012	8:30:33 AM	SiCl4 pre valve closed
1/19/2012	8:30:33 AM	SiCl4 post valve closed
1/19/2012	8:30:33 AM	Main Vac valve closed
1/19/2012	8:30:33 AM	Bubbler valve closed
1/19/2012	8:30:33 AM	Bypass valve opened
1/19/2012	8:30:33 AM	Helium MFC set to  0.000000
1/19/2012	8:30:33 AM	H2 MFC set to  0.000000
1/19/2012	8:30:33 AM	BCl3 MFC set to  0.000000
1/19/2012	8:30:33 AM	PH3 MFC set to  0.000000
1/19/2012	8:30:33 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:30:33 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:30:33 AM	Tube furnace set to 0
1/19/2012	8:31:30 AM	Helium valve closed
1/19/2012	8:31:30 AM	H2 valve closed
1/19/2012	8:31:30 AM	BCl3 valve closed
1/19/2012	8:31:30 AM	PH3 valve closed
1/19/2012	8:31:30 AM	SiCl4 pre valve closed
1/19/2012	8:31:30 AM	SiCl4 post valve closed
1/19/2012	8:31:30 AM	Main Vac valve closed
1/19/2012	8:31:30 AM	Bubbler valve closed
1/19/2012	8:31:30 AM	Bypass valve opened
1/19/2012	8:31:30 AM	Helium MFC set to  0.000000
1/19/2012	8:31:30 AM	H2 MFC set to  0.000000
1/19/2012	8:31:30 AM	BCl3 MFC set to  0.000000
1/19/2012	8:31:30 AM	PH3 MFC set to  0.000000
1/19/2012	8:31:30 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:31:30 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:31:30 AM	Tube furnace set to 0
1/19/2012	8:32:30 AM	Helium valve closed
1/19/2012	8:32:30 AM	H2 valve closed
1/19/2012	8:32:30 AM	BCl3 valve closed
1/19/2012	8:32:30 AM	PH3 valve closed
1/19/2012	8:32:30 AM	SiCl4 pre valve closed
1/19/2012	8:32:30 AM	SiCl4 post valve closed
1/19/2012	8:32:30 AM	Bypass valve closed
1/19/2012	8:32:30 AM	Bubbler valve closed
1/19/2012	8:32:30 AM	Main Vac valve opened
1/19/2012	8:32:30 AM	Helium MFC set to  0.000000
1/19/2012	8:32:30 AM	H2 MFC set to  0.000000
1/19/2012	8:32:30 AM	BCl3 MFC set to  0.000000
1/19/2012	8:32:30 AM	PH3 MFC set to  0.000000
1/19/2012	8:32:30 AM	SiCl4 MFC set to  0.000000
1/19/2012	8:32:30 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:32:31 AM	Tube furnace set to 0
1/19/2012	8:32:32 AM	Run finished at 8:32 AM
1/19/2012	8:32:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2012	10:27:22 AM	Main Vac valve closed
1/19/2012	10:27:32 AM	Main Vac valve opened
1/19/2012	10:28:02 AM	Recipe started at 10:27 AM
1/19/2012	10:28:02 AM	Helium valve closed
1/19/2012	10:28:02 AM	H2 valve closed
1/19/2012	10:28:02 AM	BCl3 valve closed
1/19/2012	10:28:02 AM	PH3 valve closed
1/19/2012	10:28:02 AM	SiCl4 pre valve closed
1/19/2012	10:28:02 AM	SiCl4 post valve closed
1/19/2012	10:28:02 AM	Bypass valve closed
1/19/2012	10:28:02 AM	Bubbler valve closed
1/19/2012	10:28:02 AM	Main Vac valve opened
1/19/2012	10:28:02 AM	Helium MFC set to  0.000000
1/19/2012	10:28:02 AM	H2 MFC set to  0.000000
1/19/2012	10:28:02 AM	BCl3 MFC set to  0.000000
1/19/2012	10:28:02 AM	PH3 MFC set to  0.000000
1/19/2012	10:28:02 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:28:02 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:28:02 AM	Tube furnace set to 0
1/19/2012	10:28:32 AM	H2 valve closed
1/19/2012	10:28:32 AM	BCl3 valve closed
1/19/2012	10:28:32 AM	PH3 valve closed
1/19/2012	10:28:32 AM	SiCl4 pre valve closed
1/19/2012	10:28:32 AM	SiCl4 post valve closed
1/19/2012	10:28:32 AM	Bypass valve closed
1/19/2012	10:28:32 AM	Bubbler valve closed
1/19/2012	10:28:32 AM	Helium valve opened
1/19/2012	10:28:32 AM	Main Vac valve opened
1/19/2012	10:28:32 AM	Helium MFC set to  20.000000
1/19/2012	10:28:32 AM	H2 MFC set to  0.000000
1/19/2012	10:28:32 AM	BCl3 MFC set to  0.000000
1/19/2012	10:28:32 AM	PH3 MFC set to  0.000000
1/19/2012	10:28:32 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:28:32 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:28:32 AM	Tube furnace set to 0
1/19/2012	10:29:02 AM	Helium valve closed
1/19/2012	10:29:02 AM	H2 valve closed
1/19/2012	10:29:02 AM	BCl3 valve closed
1/19/2012	10:29:02 AM	PH3 valve closed
1/19/2012	10:29:02 AM	SiCl4 pre valve closed
1/19/2012	10:29:02 AM	SiCl4 post valve closed
1/19/2012	10:29:02 AM	Bypass valve closed
1/19/2012	10:29:02 AM	Bubbler valve closed
1/19/2012	10:29:02 AM	Main Vac valve opened
1/19/2012	10:29:02 AM	Helium MFC set to  0.000000
1/19/2012	10:29:02 AM	H2 MFC set to  0.000000
1/19/2012	10:29:02 AM	BCl3 MFC set to  0.000000
1/19/2012	10:29:02 AM	PH3 MFC set to  0.000000
1/19/2012	10:29:02 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:29:02 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:29:02 AM	Tube furnace set to 0
1/19/2012	10:29:32 AM	H2 valve closed
1/19/2012	10:29:32 AM	BCl3 valve closed
1/19/2012	10:29:32 AM	PH3 valve closed
1/19/2012	10:29:32 AM	SiCl4 pre valve closed
1/19/2012	10:29:32 AM	SiCl4 post valve closed
1/19/2012	10:29:32 AM	Bypass valve closed
1/19/2012	10:29:32 AM	Bubbler valve closed
1/19/2012	10:29:32 AM	Helium valve opened
1/19/2012	10:29:32 AM	Main Vac valve opened
1/19/2012	10:29:32 AM	Helium MFC set to  20.000000
1/19/2012	10:29:32 AM	H2 MFC set to  0.000000
1/19/2012	10:29:32 AM	BCl3 MFC set to  0.000000
1/19/2012	10:29:32 AM	PH3 MFC set to  0.000000
1/19/2012	10:29:32 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:29:32 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:29:33 AM	Tube furnace set to 0
1/19/2012	10:30:03 AM	Helium valve closed
1/19/2012	10:30:03 AM	H2 valve closed
1/19/2012	10:30:03 AM	BCl3 valve closed
1/19/2012	10:30:03 AM	PH3 valve closed
1/19/2012	10:30:03 AM	SiCl4 pre valve closed
1/19/2012	10:30:03 AM	SiCl4 post valve closed
1/19/2012	10:30:03 AM	Bypass valve closed
1/19/2012	10:30:03 AM	Bubbler valve closed
1/19/2012	10:30:03 AM	Main Vac valve opened
1/19/2012	10:30:03 AM	Helium MFC set to  0.000000
1/19/2012	10:30:03 AM	H2 MFC set to  0.000000
1/19/2012	10:30:03 AM	BCl3 MFC set to  0.000000
1/19/2012	10:30:03 AM	PH3 MFC set to  0.000000
1/19/2012	10:30:03 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:30:03 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:30:03 AM	Tube furnace set to 0
1/19/2012	10:30:33 AM	H2 valve closed
1/19/2012	10:30:33 AM	BCl3 valve closed
1/19/2012	10:30:33 AM	PH3 valve closed
1/19/2012	10:30:33 AM	SiCl4 pre valve closed
1/19/2012	10:30:33 AM	SiCl4 post valve closed
1/19/2012	10:30:33 AM	Bypass valve closed
1/19/2012	10:30:33 AM	Bubbler valve closed
1/19/2012	10:30:33 AM	Helium valve opened
1/19/2012	10:30:33 AM	Main Vac valve opened
1/19/2012	10:30:33 AM	Helium MFC set to  20.000000
1/19/2012	10:30:33 AM	H2 MFC set to  0.000000
1/19/2012	10:30:33 AM	BCl3 MFC set to  0.000000
1/19/2012	10:30:33 AM	PH3 MFC set to  0.000000
1/19/2012	10:30:33 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:30:33 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:30:33 AM	Tube furnace set to 0
1/19/2012	10:31:03 AM	Helium valve closed
1/19/2012	10:31:03 AM	H2 valve closed
1/19/2012	10:31:03 AM	BCl3 valve closed
1/19/2012	10:31:03 AM	PH3 valve closed
1/19/2012	10:31:03 AM	SiCl4 pre valve closed
1/19/2012	10:31:03 AM	SiCl4 post valve closed
1/19/2012	10:31:03 AM	Bypass valve closed
1/19/2012	10:31:03 AM	Bubbler valve closed
1/19/2012	10:31:03 AM	Main Vac valve opened
1/19/2012	10:31:03 AM	Helium MFC set to  0.000000
1/19/2012	10:31:03 AM	H2 MFC set to  0.000000
1/19/2012	10:31:03 AM	BCl3 MFC set to  0.000000
1/19/2012	10:31:03 AM	PH3 MFC set to  0.000000
1/19/2012	10:31:03 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:31:03 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:31:03 AM	Tube furnace set to 0
1/19/2012	10:31:33 AM	H2 valve closed
1/19/2012	10:31:33 AM	BCl3 valve closed
1/19/2012	10:31:33 AM	PH3 valve closed
1/19/2012	10:31:33 AM	SiCl4 pre valve closed
1/19/2012	10:31:33 AM	SiCl4 post valve closed
1/19/2012	10:31:33 AM	Bypass valve closed
1/19/2012	10:31:33 AM	Bubbler valve closed
1/19/2012	10:31:33 AM	Helium valve opened
1/19/2012	10:31:33 AM	Main Vac valve opened
1/19/2012	10:31:33 AM	Helium MFC set to  20.000000
1/19/2012	10:31:33 AM	H2 MFC set to  0.000000
1/19/2012	10:31:33 AM	BCl3 MFC set to  0.000000
1/19/2012	10:31:33 AM	PH3 MFC set to  0.000000
1/19/2012	10:31:33 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:31:33 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:31:33 AM	Tube furnace set to 0
1/19/2012	10:32:03 AM	Helium valve closed
1/19/2012	10:32:03 AM	H2 valve closed
1/19/2012	10:32:03 AM	BCl3 valve closed
1/19/2012	10:32:03 AM	PH3 valve closed
1/19/2012	10:32:03 AM	SiCl4 pre valve closed
1/19/2012	10:32:03 AM	SiCl4 post valve closed
1/19/2012	10:32:03 AM	Bypass valve closed
1/19/2012	10:32:03 AM	Bubbler valve closed
1/19/2012	10:32:03 AM	Main Vac valve opened
1/19/2012	10:32:03 AM	Helium MFC set to  0.000000
1/19/2012	10:32:03 AM	H2 MFC set to  0.000000
1/19/2012	10:32:03 AM	BCl3 MFC set to  0.000000
1/19/2012	10:32:03 AM	PH3 MFC set to  0.000000
1/19/2012	10:32:03 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:32:03 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:32:04 AM	Tube furnace set to 0
1/19/2012	10:32:34 AM	H2 valve closed
1/19/2012	10:32:34 AM	BCl3 valve closed
1/19/2012	10:32:34 AM	PH3 valve closed
1/19/2012	10:32:34 AM	SiCl4 pre valve closed
1/19/2012	10:32:34 AM	SiCl4 post valve closed
1/19/2012	10:32:34 AM	Bypass valve closed
1/19/2012	10:32:34 AM	Bubbler valve closed
1/19/2012	10:32:34 AM	Helium valve opened
1/19/2012	10:32:34 AM	Main Vac valve opened
1/19/2012	10:32:34 AM	Helium MFC set to  20.000000
1/19/2012	10:32:34 AM	H2 MFC set to  0.000000
1/19/2012	10:32:34 AM	BCl3 MFC set to  0.000000
1/19/2012	10:32:34 AM	PH3 MFC set to  0.000000
1/19/2012	10:32:34 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:32:34 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:32:34 AM	Tube furnace set to 0
1/19/2012	10:33:04 AM	Helium valve closed
1/19/2012	10:33:04 AM	H2 valve closed
1/19/2012	10:33:04 AM	BCl3 valve closed
1/19/2012	10:33:04 AM	PH3 valve closed
1/19/2012	10:33:04 AM	SiCl4 pre valve closed
1/19/2012	10:33:04 AM	SiCl4 post valve closed
1/19/2012	10:33:04 AM	Bypass valve closed
1/19/2012	10:33:04 AM	Bubbler valve closed
1/19/2012	10:33:04 AM	Main Vac valve opened
1/19/2012	10:33:04 AM	Helium MFC set to  0.000000
1/19/2012	10:33:04 AM	H2 MFC set to  0.000000
1/19/2012	10:33:04 AM	BCl3 MFC set to  0.000000
1/19/2012	10:33:04 AM	PH3 MFC set to  0.000000
1/19/2012	10:33:04 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:33:04 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:33:04 AM	Tube furnace set to 0
1/19/2012	10:33:34 AM	H2 valve closed
1/19/2012	10:33:34 AM	BCl3 valve closed
1/19/2012	10:33:34 AM	PH3 valve closed
1/19/2012	10:33:34 AM	SiCl4 pre valve closed
1/19/2012	10:33:34 AM	SiCl4 post valve closed
1/19/2012	10:33:34 AM	Bypass valve closed
1/19/2012	10:33:34 AM	Bubbler valve closed
1/19/2012	10:33:34 AM	Helium valve opened
1/19/2012	10:33:34 AM	Main Vac valve opened
1/19/2012	10:33:34 AM	Helium MFC set to  20.000000
1/19/2012	10:33:34 AM	H2 MFC set to  0.000000
1/19/2012	10:33:34 AM	BCl3 MFC set to  0.000000
1/19/2012	10:33:34 AM	PH3 MFC set to  0.000000
1/19/2012	10:33:34 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:33:34 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:33:34 AM	Tube furnace set to 0
1/19/2012	10:34:04 AM	Helium valve closed
1/19/2012	10:34:04 AM	H2 valve closed
1/19/2012	10:34:04 AM	BCl3 valve closed
1/19/2012	10:34:04 AM	PH3 valve closed
1/19/2012	10:34:04 AM	SiCl4 pre valve closed
1/19/2012	10:34:04 AM	SiCl4 post valve closed
1/19/2012	10:34:04 AM	Bypass valve closed
1/19/2012	10:34:04 AM	Bubbler valve closed
1/19/2012	10:34:04 AM	Main Vac valve opened
1/19/2012	10:34:04 AM	Helium MFC set to  0.000000
1/19/2012	10:34:04 AM	H2 MFC set to  0.000000
1/19/2012	10:34:04 AM	BCl3 MFC set to  0.000000
1/19/2012	10:34:04 AM	PH3 MFC set to  0.000000
1/19/2012	10:34:04 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:34:04 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:34:04 AM	Tube furnace set to 0
1/19/2012	10:34:34 AM	H2 valve closed
1/19/2012	10:34:34 AM	BCl3 valve closed
1/19/2012	10:34:34 AM	PH3 valve closed
1/19/2012	10:34:34 AM	SiCl4 pre valve closed
1/19/2012	10:34:34 AM	SiCl4 post valve closed
1/19/2012	10:34:34 AM	Bypass valve closed
1/19/2012	10:34:34 AM	Bubbler valve closed
1/19/2012	10:34:34 AM	Helium valve opened
1/19/2012	10:34:34 AM	Main Vac valve opened
1/19/2012	10:34:34 AM	Helium MFC set to  20.000000
1/19/2012	10:34:34 AM	H2 MFC set to  0.000000
1/19/2012	10:34:34 AM	BCl3 MFC set to  0.000000
1/19/2012	10:34:34 AM	PH3 MFC set to  0.000000
1/19/2012	10:34:34 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:34:34 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:34:35 AM	Tube furnace set to 0
1/19/2012	10:35:05 AM	Helium valve closed
1/19/2012	10:35:05 AM	H2 valve closed
1/19/2012	10:35:05 AM	BCl3 valve closed
1/19/2012	10:35:05 AM	PH3 valve closed
1/19/2012	10:35:05 AM	SiCl4 pre valve closed
1/19/2012	10:35:05 AM	SiCl4 post valve closed
1/19/2012	10:35:05 AM	Bypass valve closed
1/19/2012	10:35:05 AM	Bubbler valve closed
1/19/2012	10:35:05 AM	Main Vac valve opened
1/19/2012	10:35:05 AM	Helium MFC set to  0.000000
1/19/2012	10:35:05 AM	H2 MFC set to  0.000000
1/19/2012	10:35:05 AM	BCl3 MFC set to  0.000000
1/19/2012	10:35:05 AM	PH3 MFC set to  0.000000
1/19/2012	10:35:05 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:35:05 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:35:05 AM	Tube furnace set to 0
1/19/2012	10:35:35 AM	H2 valve closed
1/19/2012	10:35:35 AM	BCl3 valve closed
1/19/2012	10:35:35 AM	PH3 valve closed
1/19/2012	10:35:35 AM	SiCl4 pre valve closed
1/19/2012	10:35:35 AM	SiCl4 post valve closed
1/19/2012	10:35:35 AM	Bypass valve closed
1/19/2012	10:35:35 AM	Bubbler valve closed
1/19/2012	10:35:35 AM	Helium valve opened
1/19/2012	10:35:35 AM	Main Vac valve opened
1/19/2012	10:35:35 AM	Helium MFC set to  20.000000
1/19/2012	10:35:35 AM	H2 MFC set to  0.000000
1/19/2012	10:35:35 AM	BCl3 MFC set to  0.000000
1/19/2012	10:35:35 AM	PH3 MFC set to  0.000000
1/19/2012	10:35:35 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:35:35 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:35:35 AM	Tube furnace set to 0
1/19/2012	10:36:05 AM	Helium valve closed
1/19/2012	10:36:05 AM	H2 valve closed
1/19/2012	10:36:05 AM	BCl3 valve closed
1/19/2012	10:36:05 AM	PH3 valve closed
1/19/2012	10:36:05 AM	SiCl4 pre valve closed
1/19/2012	10:36:05 AM	SiCl4 post valve closed
1/19/2012	10:36:05 AM	Bypass valve closed
1/19/2012	10:36:05 AM	Bubbler valve closed
1/19/2012	10:36:05 AM	Main Vac valve opened
1/19/2012	10:36:05 AM	Helium MFC set to  0.000000
1/19/2012	10:36:05 AM	H2 MFC set to  0.000000
1/19/2012	10:36:05 AM	BCl3 MFC set to  0.000000
1/19/2012	10:36:05 AM	PH3 MFC set to  0.000000
1/19/2012	10:36:05 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:36:05 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:36:05 AM	Tube furnace set to 0
1/19/2012	10:36:35 AM	H2 valve closed
1/19/2012	10:36:35 AM	BCl3 valve closed
1/19/2012	10:36:35 AM	PH3 valve closed
1/19/2012	10:36:35 AM	SiCl4 pre valve closed
1/19/2012	10:36:35 AM	SiCl4 post valve closed
1/19/2012	10:36:35 AM	Bypass valve closed
1/19/2012	10:36:35 AM	Bubbler valve closed
1/19/2012	10:36:35 AM	Helium valve opened
1/19/2012	10:36:35 AM	Main Vac valve opened
1/19/2012	10:36:35 AM	Helium MFC set to  20.000000
1/19/2012	10:36:35 AM	H2 MFC set to  0.000000
1/19/2012	10:36:35 AM	BCl3 MFC set to  0.000000
1/19/2012	10:36:35 AM	PH3 MFC set to  0.000000
1/19/2012	10:36:35 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:36:35 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:36:35 AM	Tube furnace set to 0
1/19/2012	10:37:05 AM	Helium valve closed
1/19/2012	10:37:05 AM	H2 valve closed
1/19/2012	10:37:05 AM	BCl3 valve closed
1/19/2012	10:37:05 AM	PH3 valve closed
1/19/2012	10:37:05 AM	SiCl4 pre valve closed
1/19/2012	10:37:05 AM	SiCl4 post valve closed
1/19/2012	10:37:05 AM	Bypass valve closed
1/19/2012	10:37:05 AM	Bubbler valve closed
1/19/2012	10:37:05 AM	Main Vac valve opened
1/19/2012	10:37:05 AM	Helium MFC set to  0.000000
1/19/2012	10:37:05 AM	H2 MFC set to  0.000000
1/19/2012	10:37:05 AM	BCl3 MFC set to  0.000000
1/19/2012	10:37:05 AM	PH3 MFC set to  0.000000
1/19/2012	10:37:05 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:37:05 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:37:06 AM	Tube furnace set to 0
1/19/2012	10:37:36 AM	H2 valve closed
1/19/2012	10:37:36 AM	BCl3 valve closed
1/19/2012	10:37:36 AM	PH3 valve closed
1/19/2012	10:37:36 AM	SiCl4 pre valve closed
1/19/2012	10:37:36 AM	SiCl4 post valve closed
1/19/2012	10:37:36 AM	Bypass valve closed
1/19/2012	10:37:36 AM	Bubbler valve closed
1/19/2012	10:37:36 AM	Helium valve opened
1/19/2012	10:37:36 AM	Main Vac valve opened
1/19/2012	10:37:36 AM	Helium MFC set to  20.000000
1/19/2012	10:37:36 AM	H2 MFC set to  0.000000
1/19/2012	10:37:36 AM	BCl3 MFC set to  0.000000
1/19/2012	10:37:36 AM	PH3 MFC set to  0.000000
1/19/2012	10:37:36 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:37:36 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:37:36 AM	Tube furnace set to 0
1/19/2012	10:38:06 AM	Helium valve closed
1/19/2012	10:38:06 AM	H2 valve closed
1/19/2012	10:38:06 AM	BCl3 valve closed
1/19/2012	10:38:06 AM	PH3 valve closed
1/19/2012	10:38:06 AM	SiCl4 pre valve closed
1/19/2012	10:38:06 AM	SiCl4 post valve closed
1/19/2012	10:38:06 AM	Bypass valve closed
1/19/2012	10:38:06 AM	Bubbler valve closed
1/19/2012	10:38:06 AM	Main Vac valve opened
1/19/2012	10:38:06 AM	Helium MFC set to  0.000000
1/19/2012	10:38:06 AM	H2 MFC set to  0.000000
1/19/2012	10:38:06 AM	BCl3 MFC set to  0.000000
1/19/2012	10:38:06 AM	PH3 MFC set to  0.000000
1/19/2012	10:38:06 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:38:06 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:38:06 AM	Tube furnace set to 0
1/19/2012	10:38:07 AM	Run finished at 10:38 AM
1/19/2012	10:55:44 AM	Main Vac valve closed
1/19/2012	10:56:03 AM	Main Vac valve opened
1/19/2012	10:57:05 AM	Main Vac valve closed
1/19/2012	10:57:23 AM	Main Vac valve opened
1/19/2012	10:57:23 AM	Main Vac valve closed
1/19/2012	10:57:24 AM	Main Vac valve opened
1/19/2012	10:58:56 AM	Recipe started at 10:58 AM
1/19/2012	10:58:56 AM	Helium valve closed
1/19/2012	10:58:56 AM	H2 valve closed
1/19/2012	10:58:56 AM	BCl3 valve closed
1/19/2012	10:58:56 AM	PH3 valve closed
1/19/2012	10:58:56 AM	SiCl4 pre valve closed
1/19/2012	10:58:56 AM	SiCl4 post valve closed
1/19/2012	10:58:56 AM	Main Vac valve closed
1/19/2012	10:58:56 AM	Bypass valve closed
1/19/2012	10:58:56 AM	Bubbler valve closed
1/19/2012	10:58:56 AM	Helium MFC set to  0.000000
1/19/2012	10:58:56 AM	H2 MFC set to  0.000000
1/19/2012	10:58:56 AM	BCl3 MFC set to  0.000000
1/19/2012	10:58:56 AM	PH3 MFC set to  0.000000
1/19/2012	10:58:56 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:58:56 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:58:56 AM	Tube furnace set to 0
1/19/2012	10:58:59 AM	Helium valve closed
1/19/2012	10:58:59 AM	BCl3 valve closed
1/19/2012	10:58:59 AM	PH3 valve closed
1/19/2012	10:58:59 AM	SiCl4 pre valve closed
1/19/2012	10:58:59 AM	SiCl4 post valve closed
1/19/2012	10:58:59 AM	Main Vac valve closed
1/19/2012	10:58:59 AM	Bypass valve closed
1/19/2012	10:58:59 AM	Bubbler valve closed
1/19/2012	10:58:59 AM	H2 valve opened
1/19/2012	10:58:59 AM	Helium MFC set to  0.000000
1/19/2012	10:58:59 AM	H2 MFC set to  500.000000
1/19/2012	10:58:59 AM	BCl3 MFC set to  0.000000
1/19/2012	10:58:59 AM	PH3 MFC set to  0.000000
1/19/2012	10:58:59 AM	SiCl4 MFC set to  0.000000
1/19/2012	10:58:59 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	10:59:00 AM	Tube furnace set to 0
1/19/2012	11:00:07 AM	Helium valve closed
1/19/2012	11:00:07 AM	BCl3 valve closed
1/19/2012	11:00:07 AM	PH3 valve closed
1/19/2012	11:00:07 AM	SiCl4 pre valve closed
1/19/2012	11:00:07 AM	SiCl4 post valve closed
1/19/2012	11:00:07 AM	Main Vac valve closed
1/19/2012	11:00:07 AM	Bypass valve closed
1/19/2012	11:00:07 AM	H2 valve opened
1/19/2012	11:00:07 AM	Bubbler valve opened
1/19/2012	11:00:07 AM	Helium MFC set to  0.000000
1/19/2012	11:00:07 AM	H2 MFC set to  500.000000
1/19/2012	11:00:07 AM	BCl3 MFC set to  0.000000
1/19/2012	11:00:07 AM	PH3 MFC set to  0.000000
1/19/2012	11:00:07 AM	SiCl4 MFC set to  0.000000
1/19/2012	11:00:07 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	11:00:08 AM	Tube furnace set to 0
1/19/2012	11:00:09 AM	Helium valve closed
1/19/2012	11:00:09 AM	BCl3 valve closed
1/19/2012	11:00:09 AM	PH3 valve closed
1/19/2012	11:00:09 AM	SiCl4 pre valve closed
1/19/2012	11:00:09 AM	SiCl4 post valve closed
1/19/2012	11:00:09 AM	Main Vac valve closed
1/19/2012	11:00:09 AM	Bypass valve closed
1/19/2012	11:00:09 AM	H2 valve opened
1/19/2012	11:00:09 AM	Bubbler valve opened
1/19/2012	11:00:09 AM	Helium MFC set to  0.000000
1/19/2012	11:00:09 AM	H2 MFC set to  500.000000
1/19/2012	11:00:09 AM	BCl3 MFC set to  0.000000
1/19/2012	11:00:09 AM	PH3 MFC set to  0.000000
1/19/2012	11:00:09 AM	SiCl4 MFC set to  0.000000
1/19/2012	11:00:09 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	11:00:09 AM	Tube furnace set to 1000
1/19/2012	11:25:09 AM	Helium valve closed
1/19/2012	11:25:09 AM	PH3 valve closed
1/19/2012	11:25:09 AM	Main Vac valve closed
1/19/2012	11:25:09 AM	Bypass valve closed
1/19/2012	11:25:09 AM	H2 valve opened
1/19/2012	11:25:09 AM	BCl3 valve opened
1/19/2012	11:25:09 AM	SiCl4 pre valve opened
1/19/2012	11:25:09 AM	SiCl4 post valve opened
1/19/2012	11:25:09 AM	Bubbler valve opened
1/19/2012	11:25:09 AM	Helium MFC set to  0.000000
1/19/2012	11:25:09 AM	H2 MFC set to  450.000000
1/19/2012	11:25:09 AM	BCl3 MFC set to  1.500000
1/19/2012	11:25:09 AM	PH3 MFC set to  0.000000
1/19/2012	11:25:09 AM	SiCl4 MFC set to  50.000000
1/19/2012	11:25:09 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	11:25:09 AM	Tube furnace set to 1000
1/19/2012	11:55:09 AM	Helium valve closed
1/19/2012	11:55:09 AM	BCl3 valve closed
1/19/2012	11:55:09 AM	PH3 valve closed
1/19/2012	11:55:09 AM	SiCl4 pre valve closed
1/19/2012	11:55:09 AM	SiCl4 post valve closed
1/19/2012	11:55:09 AM	Main Vac valve closed
1/19/2012	11:55:09 AM	Bypass valve closed
1/19/2012	11:55:09 AM	H2 valve opened
1/19/2012	11:55:09 AM	Bubbler valve opened
1/19/2012	11:55:09 AM	Helium MFC set to  0.000000
1/19/2012	11:55:09 AM	H2 MFC set to  500.000000
1/19/2012	11:55:09 AM	BCl3 MFC set to  0.000000
1/19/2012	11:55:09 AM	PH3 MFC set to  0.000000
1/19/2012	11:55:09 AM	SiCl4 MFC set to  0.000000
1/19/2012	11:55:09 AM	Bypass solenoid MFC set to  0.000000
1/19/2012	11:55:09 AM	Tube furnace set to 750
1/19/2012	12:10:09 PM	H2 valve closed
1/19/2012	12:10:09 PM	BCl3 valve closed
1/19/2012	12:10:09 PM	PH3 valve closed
1/19/2012	12:10:09 PM	SiCl4 pre valve closed
1/19/2012	12:10:09 PM	SiCl4 post valve closed
1/19/2012	12:10:09 PM	Main Vac valve closed
1/19/2012	12:10:09 PM	Bypass valve closed
1/19/2012	12:10:09 PM	Helium valve opened
1/19/2012	12:10:09 PM	Bubbler valve opened
1/19/2012	12:10:09 PM	Helium MFC set to  500.000000
1/19/2012	12:10:09 PM	H2 MFC set to  0.000000
1/19/2012	12:10:09 PM	BCl3 MFC set to  0.000000
1/19/2012	12:10:09 PM	PH3 MFC set to  0.000000
1/19/2012	12:10:09 PM	SiCl4 MFC set to  0.000000
1/19/2012	12:10:09 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	12:10:09 PM	Tube furnace set to 0
1/19/2012	12:30:09 PM	Helium valve closed
1/19/2012	12:30:09 PM	H2 valve closed
1/19/2012	12:30:09 PM	BCl3 valve closed
1/19/2012	12:30:09 PM	PH3 valve closed
1/19/2012	12:30:09 PM	SiCl4 pre valve closed
1/19/2012	12:30:09 PM	SiCl4 post valve closed
1/19/2012	12:30:09 PM	Main Vac valve closed
1/19/2012	12:30:09 PM	Bypass valve closed
1/19/2012	12:30:09 PM	Bubbler valve closed
1/19/2012	12:30:09 PM	Helium MFC set to  0.000000
1/19/2012	12:30:09 PM	H2 MFC set to  0.000000
1/19/2012	12:30:09 PM	BCl3 MFC set to  0.000000
1/19/2012	12:30:09 PM	PH3 MFC set to  0.000000
1/19/2012	12:30:09 PM	SiCl4 MFC set to  0.000000
1/19/2012	12:30:09 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	12:30:09 PM	Tube furnace set to 0
1/19/2012	12:50:09 PM	Helium valve closed
1/19/2012	12:50:09 PM	H2 valve closed
1/19/2012	12:50:09 PM	BCl3 valve closed
1/19/2012	12:50:09 PM	PH3 valve closed
1/19/2012	12:50:09 PM	SiCl4 pre valve closed
1/19/2012	12:50:09 PM	SiCl4 post valve closed
1/19/2012	12:50:09 PM	Main Vac valve closed
1/19/2012	12:50:09 PM	Bubbler valve closed
1/19/2012	12:50:09 PM	Bypass valve opened
1/19/2012	12:50:09 PM	Helium MFC set to  0.000000
1/19/2012	12:50:09 PM	H2 MFC set to  0.000000
1/19/2012	12:50:09 PM	BCl3 MFC set to  0.000000
1/19/2012	12:50:09 PM	PH3 MFC set to  0.000000
1/19/2012	12:50:09 PM	SiCl4 MFC set to  0.000000
1/19/2012	12:50:09 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	12:50:10 PM	Tube furnace set to 0
1/19/2012	12:50:54 PM	Helium valve closed
1/19/2012	12:50:54 PM	H2 valve closed
1/19/2012	12:50:54 PM	BCl3 valve closed
1/19/2012	12:50:54 PM	PH3 valve closed
1/19/2012	12:50:54 PM	SiCl4 pre valve closed
1/19/2012	12:50:54 PM	SiCl4 post valve closed
1/19/2012	12:50:54 PM	Main Vac valve closed
1/19/2012	12:50:54 PM	Bubbler valve closed
1/19/2012	12:50:54 PM	Bypass valve opened
1/19/2012	12:50:54 PM	Helium MFC set to  0.000000
1/19/2012	12:50:54 PM	H2 MFC set to  0.000000
1/19/2012	12:50:54 PM	BCl3 MFC set to  0.000000
1/19/2012	12:50:54 PM	PH3 MFC set to  0.000000
1/19/2012	12:50:54 PM	SiCl4 MFC set to  0.000000
1/19/2012	12:50:54 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	12:50:54 PM	Tube furnace set to 0
1/19/2012	12:51:54 PM	Helium valve closed
1/19/2012	12:51:54 PM	H2 valve closed
1/19/2012	12:51:54 PM	BCl3 valve closed
1/19/2012	12:51:54 PM	PH3 valve closed
1/19/2012	12:51:54 PM	SiCl4 pre valve closed
1/19/2012	12:51:54 PM	SiCl4 post valve closed
1/19/2012	12:51:54 PM	Bypass valve closed
1/19/2012	12:51:54 PM	Bubbler valve closed
1/19/2012	12:51:54 PM	Main Vac valve opened
1/19/2012	12:51:54 PM	Helium MFC set to  0.000000
1/19/2012	12:51:54 PM	H2 MFC set to  0.000000
1/19/2012	12:51:54 PM	BCl3 MFC set to  0.000000
1/19/2012	12:51:55 PM	PH3 MFC set to  0.000000
1/19/2012	12:51:55 PM	SiCl4 MFC set to  0.000000
1/19/2012	12:51:55 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	12:51:55 PM	Tube furnace set to 0
1/19/2012	1:14:33 PM	Run aborted at 1:14 PM
1/19/2012	1:14:33 PM	Helium valve closed
1/19/2012	1:14:33 PM	H2 valve closed
1/19/2012	1:14:33 PM	BCl3 valve closed
1/19/2012	1:14:33 PM	PH3 valve closed
1/19/2012	1:14:33 PM	SiCl4 pre valve closed
1/19/2012	1:14:33 PM	SiCl4 post valve closed
1/19/2012	1:14:33 PM	Bypass valve closed
1/19/2012	1:14:33 PM	Main Vac valve closed
1/19/2012	1:14:33 PM	Bubbler valve closed
1/19/2012	1:14:33 PM	Helium MFC set to  0.000000
1/19/2012	1:14:33 PM	H2 MFC set to  0.000000
1/19/2012	1:14:33 PM	BCl3 MFC set to  0.000000
1/19/2012	1:14:33 PM	PH3 MFC set to  0.000000
1/19/2012	1:14:33 PM	SiCl4 MFC set to  0.000000
1/19/2012	1:14:33 PM	Tube furnace set to 0
1/19/2012	1:14:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2012	1:14:37 PM	Recipe started at 1:14 PM
1/19/2012	1:14:37 PM	Helium valve closed
1/19/2012	1:14:37 PM	H2 valve closed
1/19/2012	1:14:37 PM	BCl3 valve closed
1/19/2012	1:14:37 PM	PH3 valve closed
1/19/2012	1:14:37 PM	SiCl4 pre valve closed
1/19/2012	1:14:37 PM	SiCl4 post valve closed
1/19/2012	1:14:37 PM	Main Vac valve closed
1/19/2012	1:14:37 PM	Bypass valve closed
1/19/2012	1:14:37 PM	Bubbler valve closed
1/19/2012	1:14:37 PM	Helium MFC set to  0.000000
1/19/2012	1:14:37 PM	H2 MFC set to  0.000000
1/19/2012	1:14:37 PM	BCl3 MFC set to  0.000000
1/19/2012	1:14:37 PM	PH3 MFC set to  0.000000
1/19/2012	1:14:37 PM	SiCl4 MFC set to  0.000000
1/19/2012	1:14:37 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	1:14:38 PM	Tube furnace set to 0
1/19/2012	1:14:41 PM	H2 valve closed
1/19/2012	1:14:41 PM	BCl3 valve closed
1/19/2012	1:14:41 PM	PH3 valve closed
1/19/2012	1:14:41 PM	SiCl4 pre valve closed
1/19/2012	1:14:41 PM	SiCl4 post valve closed
1/19/2012	1:14:41 PM	Main Vac valve closed
1/19/2012	1:14:41 PM	Bypass valve closed
1/19/2012	1:14:41 PM	Bubbler valve closed
1/19/2012	1:14:41 PM	Helium valve opened
1/19/2012	1:14:41 PM	Helium MFC set to  500.000000
1/19/2012	1:14:41 PM	H2 MFC set to  0.000000
1/19/2012	1:14:41 PM	BCl3 MFC set to  0.000000
1/19/2012	1:14:41 PM	PH3 MFC set to  0.000000
1/19/2012	1:14:41 PM	SiCl4 MFC set to  0.000000
1/19/2012	1:14:41 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	1:14:41 PM	Tube furnace set to 0
1/19/2012	1:15:45 PM	Helium valve closed
1/19/2012	1:15:45 PM	H2 valve closed
1/19/2012	1:15:45 PM	BCl3 valve closed
1/19/2012	1:15:45 PM	PH3 valve closed
1/19/2012	1:15:45 PM	SiCl4 pre valve closed
1/19/2012	1:15:45 PM	SiCl4 post valve closed
1/19/2012	1:15:45 PM	Main Vac valve closed
1/19/2012	1:15:45 PM	Bypass valve closed
1/19/2012	1:15:45 PM	Bubbler valve closed
1/19/2012	1:15:45 PM	Helium MFC set to  0.000000
1/19/2012	1:15:45 PM	H2 MFC set to  0.000000
1/19/2012	1:15:45 PM	BCl3 MFC set to  0.000000
1/19/2012	1:15:45 PM	PH3 MFC set to  0.000000
1/19/2012	1:15:45 PM	SiCl4 MFC set to  0.000000
1/19/2012	1:15:45 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	1:15:46 PM	Tube furnace set to 0
1/19/2012	1:15:47 PM	Run finished at 1:15 PM
1/19/2012	1:15:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2012	1:19:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2012	1:19:37 PM	Recipe started at 1:19 PM
1/19/2012	1:19:37 PM	Helium valve closed
1/19/2012	1:19:37 PM	H2 valve closed
1/19/2012	1:19:37 PM	BCl3 valve closed
1/19/2012	1:19:37 PM	PH3 valve closed
1/19/2012	1:19:37 PM	SiCl4 pre valve closed
1/19/2012	1:19:37 PM	SiCl4 post valve closed
1/19/2012	1:19:37 PM	Main Vac valve closed
1/19/2012	1:19:37 PM	Bubbler valve closed
1/19/2012	1:19:37 PM	Bypass valve opened
1/19/2012	1:19:37 PM	Helium MFC set to  0.000000
1/19/2012	1:19:37 PM	H2 MFC set to  0.000000
1/19/2012	1:19:37 PM	BCl3 MFC set to  0.000000
1/19/2012	1:19:37 PM	PH3 MFC set to  0.000000
1/19/2012	1:19:37 PM	SiCl4 MFC set to  0.000000
1/19/2012	1:19:37 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	1:19:37 PM	Tube furnace set to 0
1/19/2012	1:20:34 PM	Helium valve closed
1/19/2012	1:20:34 PM	H2 valve closed
1/19/2012	1:20:34 PM	BCl3 valve closed
1/19/2012	1:20:34 PM	PH3 valve closed
1/19/2012	1:20:34 PM	SiCl4 pre valve closed
1/19/2012	1:20:34 PM	SiCl4 post valve closed
1/19/2012	1:20:34 PM	Main Vac valve closed
1/19/2012	1:20:34 PM	Bubbler valve closed
1/19/2012	1:20:34 PM	Bypass valve opened
1/19/2012	1:20:34 PM	Helium MFC set to  0.000000
1/19/2012	1:20:34 PM	H2 MFC set to  0.000000
1/19/2012	1:20:34 PM	BCl3 MFC set to  0.000000
1/19/2012	1:20:34 PM	PH3 MFC set to  0.000000
1/19/2012	1:20:34 PM	SiCl4 MFC set to  0.000000
1/19/2012	1:20:34 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	1:20:34 PM	Tube furnace set to 0
1/19/2012	1:21:34 PM	Helium valve closed
1/19/2012	1:21:34 PM	H2 valve closed
1/19/2012	1:21:34 PM	BCl3 valve closed
1/19/2012	1:21:34 PM	PH3 valve closed
1/19/2012	1:21:34 PM	SiCl4 pre valve closed
1/19/2012	1:21:34 PM	SiCl4 post valve closed
1/19/2012	1:21:34 PM	Bypass valve closed
1/19/2012	1:21:34 PM	Bubbler valve closed
1/19/2012	1:21:34 PM	Main Vac valve opened
1/19/2012	1:21:34 PM	Helium MFC set to  0.000000
1/19/2012	1:21:34 PM	H2 MFC set to  0.000000
1/19/2012	1:21:34 PM	BCl3 MFC set to  0.000000
1/19/2012	1:21:34 PM	PH3 MFC set to  0.000000
1/19/2012	1:21:34 PM	SiCl4 MFC set to  0.000000
1/19/2012	1:21:34 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	1:21:35 PM	Tube furnace set to 0
1/19/2012	1:21:36 PM	Run finished at 1:21 PM
1/19/2012	1:21:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2012	1:23:37 PM	Recipe started at 1:23 PM
1/19/2012	1:23:37 PM	Helium valve closed
1/19/2012	1:23:37 PM	H2 valve closed
1/19/2012	1:23:37 PM	BCl3 valve closed
1/19/2012	1:23:37 PM	PH3 valve closed
1/19/2012	1:23:37 PM	SiCl4 pre valve closed
1/19/2012	1:23:37 PM	SiCl4 post valve closed
1/19/2012	1:23:37 PM	Bypass valve closed
1/19/2012	1:23:37 PM	Bubbler valve closed
1/19/2012	1:23:37 PM	Main Vac valve opened
1/19/2012	1:23:37 PM	Helium MFC set to  0.000000
1/19/2012	1:23:37 PM	H2 MFC set to  0.000000
1/19/2012	1:23:37 PM	BCl3 MFC set to  0.000000
1/19/2012	1:23:37 PM	PH3 MFC set to  0.000000
1/19/2012	1:23:37 PM	SiCl4 MFC set to  0.000000
1/19/2012	1:23:37 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	1:23:37 PM	Tube furnace set to 0
1/19/2012	2:53:38 PM	Helium valve closed
1/19/2012	2:53:38 PM	H2 valve closed
1/19/2012	2:53:38 PM	BCl3 valve closed
1/19/2012	2:53:38 PM	PH3 valve closed
1/19/2012	2:53:38 PM	SiCl4 pre valve closed
1/19/2012	2:53:38 PM	SiCl4 post valve closed
1/19/2012	2:53:38 PM	Main Vac valve closed
1/19/2012	2:53:38 PM	Bypass valve closed
1/19/2012	2:53:38 PM	Bubbler valve closed
1/19/2012	2:53:38 PM	Helium MFC set to  0.000000
1/19/2012	2:53:38 PM	H2 MFC set to  0.000000
1/19/2012	2:53:38 PM	BCl3 MFC set to  0.000000
1/19/2012	2:53:38 PM	PH3 MFC set to  0.000000
1/19/2012	2:53:38 PM	SiCl4 MFC set to  0.000000
1/19/2012	2:53:38 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	2:53:38 PM	Tube furnace set to 0
1/19/2012	2:53:41 PM	Helium valve closed
1/19/2012	2:53:41 PM	BCl3 valve closed
1/19/2012	2:53:41 PM	PH3 valve closed
1/19/2012	2:53:41 PM	SiCl4 pre valve closed
1/19/2012	2:53:41 PM	SiCl4 post valve closed
1/19/2012	2:53:41 PM	Main Vac valve closed
1/19/2012	2:53:41 PM	Bypass valve closed
1/19/2012	2:53:41 PM	Bubbler valve closed
1/19/2012	2:53:41 PM	H2 valve opened
1/19/2012	2:53:41 PM	Helium MFC set to  0.000000
1/19/2012	2:53:41 PM	H2 MFC set to  500.000000
1/19/2012	2:53:41 PM	BCl3 MFC set to  0.000000
1/19/2012	2:53:41 PM	PH3 MFC set to  0.000000
1/19/2012	2:53:41 PM	SiCl4 MFC set to  0.000000
1/19/2012	2:53:41 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	2:53:41 PM	Tube furnace set to 0
1/19/2012	2:54:48 PM	Helium valve closed
1/19/2012	2:54:48 PM	BCl3 valve closed
1/19/2012	2:54:48 PM	PH3 valve closed
1/19/2012	2:54:48 PM	SiCl4 pre valve closed
1/19/2012	2:54:48 PM	SiCl4 post valve closed
1/19/2012	2:54:48 PM	Main Vac valve closed
1/19/2012	2:54:48 PM	Bypass valve closed
1/19/2012	2:54:48 PM	H2 valve opened
1/19/2012	2:54:48 PM	Bubbler valve opened
1/19/2012	2:54:48 PM	Helium MFC set to  0.000000
1/19/2012	2:54:48 PM	H2 MFC set to  500.000000
1/19/2012	2:54:48 PM	BCl3 MFC set to  0.000000
1/19/2012	2:54:48 PM	PH3 MFC set to  0.000000
1/19/2012	2:54:48 PM	SiCl4 MFC set to  0.000000
1/19/2012	2:54:48 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	2:54:49 PM	Tube furnace set to 0
1/19/2012	2:54:50 PM	Helium valve closed
1/19/2012	2:54:50 PM	BCl3 valve closed
1/19/2012	2:54:50 PM	PH3 valve closed
1/19/2012	2:54:50 PM	SiCl4 pre valve closed
1/19/2012	2:54:50 PM	SiCl4 post valve closed
1/19/2012	2:54:50 PM	Main Vac valve closed
1/19/2012	2:54:50 PM	Bypass valve closed
1/19/2012	2:54:50 PM	H2 valve opened
1/19/2012	2:54:50 PM	Bubbler valve opened
1/19/2012	2:54:50 PM	Helium MFC set to  0.000000
1/19/2012	2:54:50 PM	H2 MFC set to  500.000000
1/19/2012	2:54:50 PM	BCl3 MFC set to  0.000000
1/19/2012	2:54:50 PM	PH3 MFC set to  0.000000
1/19/2012	2:54:50 PM	SiCl4 MFC set to  0.000000
1/19/2012	2:54:50 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	2:54:50 PM	Tube furnace set to 1000
1/19/2012	3:19:50 PM	Helium valve closed
1/19/2012	3:19:50 PM	PH3 valve closed
1/19/2012	3:19:50 PM	Main Vac valve closed
1/19/2012	3:19:50 PM	Bypass valve closed
1/19/2012	3:19:50 PM	H2 valve opened
1/19/2012	3:19:50 PM	BCl3 valve opened
1/19/2012	3:19:50 PM	SiCl4 pre valve opened
1/19/2012	3:19:50 PM	SiCl4 post valve opened
1/19/2012	3:19:50 PM	Bubbler valve opened
1/19/2012	3:19:50 PM	Helium MFC set to  0.000000
1/19/2012	3:19:50 PM	H2 MFC set to  450.000000
1/19/2012	3:19:50 PM	BCl3 MFC set to  1.500000
1/19/2012	3:19:50 PM	PH3 MFC set to  0.000000
1/19/2012	3:19:50 PM	SiCl4 MFC set to  50.000000
1/19/2012	3:19:50 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	3:19:50 PM	Tube furnace set to 1000
1/19/2012	3:54:50 PM	Helium valve closed
1/19/2012	3:54:50 PM	BCl3 valve closed
1/19/2012	3:54:50 PM	PH3 valve closed
1/19/2012	3:54:50 PM	SiCl4 pre valve closed
1/19/2012	3:54:50 PM	SiCl4 post valve closed
1/19/2012	3:54:50 PM	Main Vac valve closed
1/19/2012	3:54:50 PM	Bypass valve closed
1/19/2012	3:54:50 PM	H2 valve opened
1/19/2012	3:54:50 PM	Bubbler valve opened
1/19/2012	3:54:50 PM	Helium MFC set to  0.000000
1/19/2012	3:54:50 PM	H2 MFC set to  500.000000
1/19/2012	3:54:50 PM	BCl3 MFC set to  0.000000
1/19/2012	3:54:50 PM	PH3 MFC set to  0.000000
1/19/2012	3:54:50 PM	SiCl4 MFC set to  0.000000
1/19/2012	3:54:50 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	3:54:50 PM	Tube furnace set to 750
1/19/2012	4:09:50 PM	H2 valve closed
1/19/2012	4:09:50 PM	BCl3 valve closed
1/19/2012	4:09:50 PM	PH3 valve closed
1/19/2012	4:09:50 PM	SiCl4 pre valve closed
1/19/2012	4:09:50 PM	SiCl4 post valve closed
1/19/2012	4:09:50 PM	Main Vac valve closed
1/19/2012	4:09:50 PM	Bypass valve closed
1/19/2012	4:09:50 PM	Helium valve opened
1/19/2012	4:09:50 PM	Bubbler valve opened
1/19/2012	4:09:50 PM	Helium MFC set to  500.000000
1/19/2012	4:09:50 PM	H2 MFC set to  0.000000
1/19/2012	4:09:50 PM	BCl3 MFC set to  0.000000
1/19/2012	4:09:50 PM	PH3 MFC set to  0.000000
1/19/2012	4:09:50 PM	SiCl4 MFC set to  0.000000
1/19/2012	4:09:50 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	4:09:50 PM	Tube furnace set to 0
1/19/2012	4:29:50 PM	Helium valve closed
1/19/2012	4:29:50 PM	H2 valve closed
1/19/2012	4:29:50 PM	BCl3 valve closed
1/19/2012	4:29:50 PM	PH3 valve closed
1/19/2012	4:29:50 PM	SiCl4 pre valve closed
1/19/2012	4:29:50 PM	SiCl4 post valve closed
1/19/2012	4:29:50 PM	Main Vac valve closed
1/19/2012	4:29:50 PM	Bypass valve closed
1/19/2012	4:29:50 PM	Bubbler valve closed
1/19/2012	4:29:50 PM	Helium MFC set to  0.000000
1/19/2012	4:29:50 PM	H2 MFC set to  0.000000
1/19/2012	4:29:50 PM	BCl3 MFC set to  0.000000
1/19/2012	4:29:50 PM	PH3 MFC set to  0.000000
1/19/2012	4:29:50 PM	SiCl4 MFC set to  0.000000
1/19/2012	4:29:50 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	4:29:50 PM	Tube furnace set to 0
1/19/2012	4:49:50 PM	Helium valve closed
1/19/2012	4:49:50 PM	H2 valve closed
1/19/2012	4:49:50 PM	BCl3 valve closed
1/19/2012	4:49:50 PM	PH3 valve closed
1/19/2012	4:49:50 PM	SiCl4 pre valve closed
1/19/2012	4:49:50 PM	SiCl4 post valve closed
1/19/2012	4:49:50 PM	Main Vac valve closed
1/19/2012	4:49:50 PM	Bubbler valve closed
1/19/2012	4:49:50 PM	Bypass valve opened
1/19/2012	4:49:50 PM	Helium MFC set to  0.000000
1/19/2012	4:49:50 PM	H2 MFC set to  0.000000
1/19/2012	4:49:50 PM	BCl3 MFC set to  0.000000
1/19/2012	4:49:50 PM	PH3 MFC set to  0.000000
1/19/2012	4:49:50 PM	SiCl4 MFC set to  0.000000
1/19/2012	4:49:50 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	4:49:51 PM	Tube furnace set to 0
1/19/2012	4:50:38 PM	Helium valve closed
1/19/2012	4:50:38 PM	H2 valve closed
1/19/2012	4:50:38 PM	BCl3 valve closed
1/19/2012	4:50:38 PM	PH3 valve closed
1/19/2012	4:50:38 PM	SiCl4 pre valve closed
1/19/2012	4:50:38 PM	SiCl4 post valve closed
1/19/2012	4:50:38 PM	Main Vac valve closed
1/19/2012	4:50:38 PM	Bubbler valve closed
1/19/2012	4:50:38 PM	Bypass valve opened
1/19/2012	4:50:38 PM	Helium MFC set to  0.000000
1/19/2012	4:50:38 PM	H2 MFC set to  0.000000
1/19/2012	4:50:38 PM	BCl3 MFC set to  0.000000
1/19/2012	4:50:38 PM	PH3 MFC set to  0.000000
1/19/2012	4:50:38 PM	SiCl4 MFC set to  0.000000
1/19/2012	4:50:38 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	4:50:38 PM	Tube furnace set to 0
1/19/2012	4:51:25 PM	Run aborted at 4:51 PM
1/19/2012	4:51:25 PM	Helium valve closed
1/19/2012	4:51:25 PM	H2 valve closed
1/19/2012	4:51:25 PM	BCl3 valve closed
1/19/2012	4:51:25 PM	PH3 valve closed
1/19/2012	4:51:25 PM	SiCl4 pre valve closed
1/19/2012	4:51:25 PM	SiCl4 post valve closed
1/19/2012	4:51:25 PM	Bypass valve closed
1/19/2012	4:51:25 PM	Main Vac valve closed
1/19/2012	4:51:25 PM	Bubbler valve closed
1/19/2012	4:51:25 PM	Helium MFC set to  0.000000
1/19/2012	4:51:25 PM	H2 MFC set to  0.000000
1/19/2012	4:51:25 PM	BCl3 MFC set to  0.000000
1/19/2012	4:51:25 PM	PH3 MFC set to  0.000000
1/19/2012	4:51:25 PM	SiCl4 MFC set to  0.000000
1/19/2012	4:51:25 PM	Tube furnace set to 0
1/19/2012	4:51:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2012	4:51:28 PM	Recipe started at 4:51 PM
1/19/2012	4:51:28 PM	Helium valve closed
1/19/2012	4:51:28 PM	H2 valve closed
1/19/2012	4:51:28 PM	BCl3 valve closed
1/19/2012	4:51:28 PM	PH3 valve closed
1/19/2012	4:51:28 PM	SiCl4 pre valve closed
1/19/2012	4:51:28 PM	SiCl4 post valve closed
1/19/2012	4:51:28 PM	Main Vac valve closed
1/19/2012	4:51:28 PM	Bypass valve closed
1/19/2012	4:51:28 PM	Bubbler valve closed
1/19/2012	4:51:28 PM	Helium MFC set to  0.000000
1/19/2012	4:51:28 PM	H2 MFC set to  0.000000
1/19/2012	4:51:28 PM	BCl3 MFC set to  0.000000
1/19/2012	4:51:28 PM	PH3 MFC set to  0.000000
1/19/2012	4:51:28 PM	SiCl4 MFC set to  0.000000
1/19/2012	4:51:28 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	4:51:28 PM	Tube furnace set to 0
1/19/2012	4:51:31 PM	H2 valve closed
1/19/2012	4:51:31 PM	BCl3 valve closed
1/19/2012	4:51:31 PM	PH3 valve closed
1/19/2012	4:51:31 PM	SiCl4 pre valve closed
1/19/2012	4:51:31 PM	SiCl4 post valve closed
1/19/2012	4:51:31 PM	Main Vac valve closed
1/19/2012	4:51:31 PM	Bypass valve closed
1/19/2012	4:51:31 PM	Bubbler valve closed
1/19/2012	4:51:31 PM	Helium valve opened
1/19/2012	4:51:31 PM	Helium MFC set to  500.000000
1/19/2012	4:51:31 PM	H2 MFC set to  0.000000
1/19/2012	4:51:31 PM	BCl3 MFC set to  0.000000
1/19/2012	4:51:31 PM	PH3 MFC set to  0.000000
1/19/2012	4:51:31 PM	SiCl4 MFC set to  0.000000
1/19/2012	4:51:31 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	4:51:32 PM	Tube furnace set to 0
1/19/2012	4:52:35 PM	Helium valve closed
1/19/2012	4:52:35 PM	H2 valve closed
1/19/2012	4:52:35 PM	BCl3 valve closed
1/19/2012	4:52:35 PM	PH3 valve closed
1/19/2012	4:52:35 PM	SiCl4 pre valve closed
1/19/2012	4:52:35 PM	SiCl4 post valve closed
1/19/2012	4:52:35 PM	Main Vac valve closed
1/19/2012	4:52:35 PM	Bypass valve closed
1/19/2012	4:52:35 PM	Bubbler valve closed
1/19/2012	4:52:35 PM	Helium MFC set to  0.000000
1/19/2012	4:52:35 PM	H2 MFC set to  0.000000
1/19/2012	4:52:35 PM	BCl3 MFC set to  0.000000
1/19/2012	4:52:35 PM	PH3 MFC set to  0.000000
1/19/2012	4:52:35 PM	SiCl4 MFC set to  0.000000
1/19/2012	4:52:35 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	4:52:35 PM	Tube furnace set to 0
1/19/2012	4:52:36 PM	Run finished at 4:52 PM
1/19/2012	4:52:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/19/2012	5:00:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2012	5:00:59 PM	Recipe started at 5:00 PM
1/19/2012	5:00:59 PM	Helium valve closed
1/19/2012	5:00:59 PM	H2 valve closed
1/19/2012	5:00:59 PM	BCl3 valve closed
1/19/2012	5:00:59 PM	PH3 valve closed
1/19/2012	5:00:59 PM	SiCl4 pre valve closed
1/19/2012	5:00:59 PM	SiCl4 post valve closed
1/19/2012	5:00:59 PM	Main Vac valve closed
1/19/2012	5:00:59 PM	Bubbler valve closed
1/19/2012	5:00:59 PM	Bypass valve opened
1/19/2012	5:00:59 PM	Helium MFC set to  0.000000
1/19/2012	5:00:59 PM	H2 MFC set to  0.000000
1/19/2012	5:00:59 PM	BCl3 MFC set to  0.000000
1/19/2012	5:00:59 PM	PH3 MFC set to  0.000000
1/19/2012	5:00:59 PM	SiCl4 MFC set to  0.000000
1/19/2012	5:00:59 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	5:01:00 PM	Tube furnace set to 0
1/19/2012	5:02:01 PM	Helium valve closed
1/19/2012	5:02:01 PM	H2 valve closed
1/19/2012	5:02:01 PM	BCl3 valve closed
1/19/2012	5:02:01 PM	PH3 valve closed
1/19/2012	5:02:01 PM	SiCl4 pre valve closed
1/19/2012	5:02:01 PM	SiCl4 post valve closed
1/19/2012	5:02:01 PM	Main Vac valve closed
1/19/2012	5:02:01 PM	Bubbler valve closed
1/19/2012	5:02:01 PM	Bypass valve opened
1/19/2012	5:02:01 PM	Helium MFC set to  0.000000
1/19/2012	5:02:01 PM	H2 MFC set to  0.000000
1/19/2012	5:02:01 PM	BCl3 MFC set to  0.000000
1/19/2012	5:02:01 PM	PH3 MFC set to  0.000000
1/19/2012	5:02:01 PM	SiCl4 MFC set to  0.000000
1/19/2012	5:02:01 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	5:02:01 PM	Tube furnace set to 0
1/19/2012	5:03:01 PM	Helium valve closed
1/19/2012	5:03:01 PM	H2 valve closed
1/19/2012	5:03:01 PM	BCl3 valve closed
1/19/2012	5:03:01 PM	PH3 valve closed
1/19/2012	5:03:01 PM	SiCl4 pre valve closed
1/19/2012	5:03:01 PM	SiCl4 post valve closed
1/19/2012	5:03:01 PM	Bypass valve closed
1/19/2012	5:03:01 PM	Bubbler valve closed
1/19/2012	5:03:01 PM	Main Vac valve opened
1/19/2012	5:03:01 PM	Helium MFC set to  0.000000
1/19/2012	5:03:01 PM	H2 MFC set to  0.000000
1/19/2012	5:03:01 PM	BCl3 MFC set to  0.000000
1/19/2012	5:03:01 PM	PH3 MFC set to  0.000000
1/19/2012	5:03:01 PM	SiCl4 MFC set to  0.000000
1/19/2012	5:03:01 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	5:03:01 PM	Tube furnace set to 0
1/19/2012	5:03:02 PM	Run finished at 5:03 PM
1/19/2012	5:03:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/19/2012	5:03:18 PM	Recipe started at 5:03 PM
1/19/2012	5:03:18 PM	Helium valve closed
1/19/2012	5:03:18 PM	H2 valve closed
1/19/2012	5:03:18 PM	BCl3 valve closed
1/19/2012	5:03:18 PM	PH3 valve closed
1/19/2012	5:03:18 PM	SiCl4 pre valve closed
1/19/2012	5:03:18 PM	SiCl4 post valve closed
1/19/2012	5:03:18 PM	Bypass valve closed
1/19/2012	5:03:18 PM	Bubbler valve closed
1/19/2012	5:03:18 PM	Main Vac valve opened
1/19/2012	5:03:18 PM	Helium MFC set to  0.000000
1/19/2012	5:03:18 PM	H2 MFC set to  0.000000
1/19/2012	5:03:18 PM	BCl3 MFC set to  0.000000
1/19/2012	5:03:18 PM	PH3 MFC set to  0.000000
1/19/2012	5:03:18 PM	SiCl4 MFC set to  0.000000
1/19/2012	5:03:18 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	5:03:18 PM	Tube furnace set to 0
1/19/2012	6:33:18 PM	Helium valve closed
1/19/2012	6:33:18 PM	H2 valve closed
1/19/2012	6:33:18 PM	BCl3 valve closed
1/19/2012	6:33:18 PM	PH3 valve closed
1/19/2012	6:33:18 PM	SiCl4 pre valve closed
1/19/2012	6:33:18 PM	SiCl4 post valve closed
1/19/2012	6:33:18 PM	Main Vac valve closed
1/19/2012	6:33:18 PM	Bypass valve closed
1/19/2012	6:33:18 PM	Bubbler valve closed
1/19/2012	6:33:18 PM	Helium MFC set to  0.000000
1/19/2012	6:33:18 PM	H2 MFC set to  0.000000
1/19/2012	6:33:18 PM	BCl3 MFC set to  0.000000
1/19/2012	6:33:18 PM	PH3 MFC set to  0.000000
1/19/2012	6:33:18 PM	SiCl4 MFC set to  0.000000
1/19/2012	6:33:18 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	6:33:18 PM	Tube furnace set to 0
1/19/2012	6:33:21 PM	Helium valve closed
1/19/2012	6:33:21 PM	BCl3 valve closed
1/19/2012	6:33:21 PM	PH3 valve closed
1/19/2012	6:33:21 PM	SiCl4 pre valve closed
1/19/2012	6:33:21 PM	SiCl4 post valve closed
1/19/2012	6:33:21 PM	Main Vac valve closed
1/19/2012	6:33:21 PM	Bypass valve closed
1/19/2012	6:33:21 PM	Bubbler valve closed
1/19/2012	6:33:21 PM	H2 valve opened
1/19/2012	6:33:21 PM	Helium MFC set to  0.000000
1/19/2012	6:33:21 PM	H2 MFC set to  500.000000
1/19/2012	6:33:21 PM	BCl3 MFC set to  0.000000
1/19/2012	6:33:21 PM	PH3 MFC set to  0.000000
1/19/2012	6:33:21 PM	SiCl4 MFC set to  0.000000
1/19/2012	6:33:21 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	6:33:21 PM	Tube furnace set to 0
1/19/2012	6:34:29 PM	Helium valve closed
1/19/2012	6:34:29 PM	BCl3 valve closed
1/19/2012	6:34:29 PM	PH3 valve closed
1/19/2012	6:34:29 PM	SiCl4 pre valve closed
1/19/2012	6:34:29 PM	SiCl4 post valve closed
1/19/2012	6:34:29 PM	Main Vac valve closed
1/19/2012	6:34:29 PM	Bypass valve closed
1/19/2012	6:34:29 PM	H2 valve opened
1/19/2012	6:34:29 PM	Bubbler valve opened
1/19/2012	6:34:29 PM	Helium MFC set to  0.000000
1/19/2012	6:34:29 PM	H2 MFC set to  500.000000
1/19/2012	6:34:29 PM	BCl3 MFC set to  0.000000
1/19/2012	6:34:29 PM	PH3 MFC set to  0.000000
1/19/2012	6:34:29 PM	SiCl4 MFC set to  0.000000
1/19/2012	6:34:29 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	6:34:29 PM	Tube furnace set to 0
1/19/2012	6:34:30 PM	Helium valve closed
1/19/2012	6:34:30 PM	BCl3 valve closed
1/19/2012	6:34:30 PM	PH3 valve closed
1/19/2012	6:34:30 PM	SiCl4 pre valve closed
1/19/2012	6:34:30 PM	SiCl4 post valve closed
1/19/2012	6:34:30 PM	Main Vac valve closed
1/19/2012	6:34:30 PM	Bypass valve closed
1/19/2012	6:34:30 PM	H2 valve opened
1/19/2012	6:34:30 PM	Bubbler valve opened
1/19/2012	6:34:30 PM	Helium MFC set to  0.000000
1/19/2012	6:34:30 PM	H2 MFC set to  500.000000
1/19/2012	6:34:30 PM	BCl3 MFC set to  0.000000
1/19/2012	6:34:30 PM	PH3 MFC set to  0.000000
1/19/2012	6:34:30 PM	SiCl4 MFC set to  0.000000
1/19/2012	6:34:30 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	6:34:30 PM	Tube furnace set to 1000
1/19/2012	6:59:30 PM	Helium valve closed
1/19/2012	6:59:30 PM	PH3 valve closed
1/19/2012	6:59:30 PM	Main Vac valve closed
1/19/2012	6:59:30 PM	Bypass valve closed
1/19/2012	6:59:30 PM	H2 valve opened
1/19/2012	6:59:30 PM	BCl3 valve opened
1/19/2012	6:59:30 PM	SiCl4 pre valve opened
1/19/2012	6:59:30 PM	SiCl4 post valve opened
1/19/2012	6:59:30 PM	Bubbler valve opened
1/19/2012	6:59:30 PM	Helium MFC set to  0.000000
1/19/2012	6:59:30 PM	H2 MFC set to  450.000000
1/19/2012	6:59:30 PM	BCl3 MFC set to  1.500000
1/19/2012	6:59:30 PM	PH3 MFC set to  0.000000
1/19/2012	6:59:30 PM	SiCl4 MFC set to  50.000000
1/19/2012	6:59:30 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	6:59:30 PM	Tube furnace set to 1000
1/19/2012	7:34:30 PM	Helium valve closed
1/19/2012	7:34:30 PM	BCl3 valve closed
1/19/2012	7:34:30 PM	PH3 valve closed
1/19/2012	7:34:30 PM	SiCl4 pre valve closed
1/19/2012	7:34:30 PM	SiCl4 post valve closed
1/19/2012	7:34:30 PM	Main Vac valve closed
1/19/2012	7:34:30 PM	Bypass valve closed
1/19/2012	7:34:30 PM	H2 valve opened
1/19/2012	7:34:30 PM	Bubbler valve opened
1/19/2012	7:34:30 PM	Helium MFC set to  0.000000
1/19/2012	7:34:30 PM	H2 MFC set to  500.000000
1/19/2012	7:34:30 PM	BCl3 MFC set to  0.000000
1/19/2012	7:34:30 PM	PH3 MFC set to  0.000000
1/19/2012	7:34:30 PM	SiCl4 MFC set to  0.000000
1/19/2012	7:34:30 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	7:34:30 PM	Tube furnace set to 750
1/19/2012	7:49:30 PM	H2 valve closed
1/19/2012	7:49:30 PM	BCl3 valve closed
1/19/2012	7:49:30 PM	PH3 valve closed
1/19/2012	7:49:30 PM	SiCl4 pre valve closed
1/19/2012	7:49:30 PM	SiCl4 post valve closed
1/19/2012	7:49:30 PM	Main Vac valve closed
1/19/2012	7:49:30 PM	Bypass valve closed
1/19/2012	7:49:30 PM	Helium valve opened
1/19/2012	7:49:30 PM	Bubbler valve opened
1/19/2012	7:49:30 PM	Helium MFC set to  500.000000
1/19/2012	7:49:30 PM	H2 MFC set to  0.000000
1/19/2012	7:49:30 PM	BCl3 MFC set to  0.000000
1/19/2012	7:49:30 PM	PH3 MFC set to  0.000000
1/19/2012	7:49:30 PM	SiCl4 MFC set to  0.000000
1/19/2012	7:49:30 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	7:49:30 PM	Tube furnace set to 0
1/19/2012	8:09:30 PM	Helium valve closed
1/19/2012	8:09:30 PM	H2 valve closed
1/19/2012	8:09:30 PM	BCl3 valve closed
1/19/2012	8:09:30 PM	PH3 valve closed
1/19/2012	8:09:30 PM	SiCl4 pre valve closed
1/19/2012	8:09:30 PM	SiCl4 post valve closed
1/19/2012	8:09:30 PM	Main Vac valve closed
1/19/2012	8:09:30 PM	Bypass valve closed
1/19/2012	8:09:30 PM	Bubbler valve closed
1/19/2012	8:09:30 PM	Helium MFC set to  0.000000
1/19/2012	8:09:30 PM	H2 MFC set to  0.000000
1/19/2012	8:09:30 PM	BCl3 MFC set to  0.000000
1/19/2012	8:09:30 PM	PH3 MFC set to  0.000000
1/19/2012	8:09:30 PM	SiCl4 MFC set to  0.000000
1/19/2012	8:09:30 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:09:31 PM	Tube furnace set to 0
1/19/2012	8:29:31 PM	Helium valve closed
1/19/2012	8:29:31 PM	H2 valve closed
1/19/2012	8:29:31 PM	BCl3 valve closed
1/19/2012	8:29:31 PM	PH3 valve closed
1/19/2012	8:29:31 PM	SiCl4 pre valve closed
1/19/2012	8:29:31 PM	SiCl4 post valve closed
1/19/2012	8:29:31 PM	Main Vac valve closed
1/19/2012	8:29:31 PM	Bubbler valve closed
1/19/2012	8:29:31 PM	Bypass valve opened
1/19/2012	8:29:31 PM	Helium MFC set to  0.000000
1/19/2012	8:29:31 PM	H2 MFC set to  0.000000
1/19/2012	8:29:31 PM	BCl3 MFC set to  0.000000
1/19/2012	8:29:31 PM	PH3 MFC set to  0.000000
1/19/2012	8:29:31 PM	SiCl4 MFC set to  0.000000
1/19/2012	8:29:31 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:29:31 PM	Tube furnace set to 0
1/19/2012	8:30:15 PM	Helium valve closed
1/19/2012	8:30:15 PM	H2 valve closed
1/19/2012	8:30:15 PM	BCl3 valve closed
1/19/2012	8:30:15 PM	PH3 valve closed
1/19/2012	8:30:15 PM	SiCl4 pre valve closed
1/19/2012	8:30:15 PM	SiCl4 post valve closed
1/19/2012	8:30:15 PM	Main Vac valve closed
1/19/2012	8:30:15 PM	Bubbler valve closed
1/19/2012	8:30:15 PM	Bypass valve opened
1/19/2012	8:30:15 PM	Helium MFC set to  0.000000
1/19/2012	8:30:15 PM	H2 MFC set to  0.000000
1/19/2012	8:30:15 PM	BCl3 MFC set to  0.000000
1/19/2012	8:30:16 PM	PH3 MFC set to  0.000000
1/19/2012	8:30:16 PM	SiCl4 MFC set to  0.000000
1/19/2012	8:30:16 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:30:16 PM	Tube furnace set to 0
1/19/2012	8:31:16 PM	Helium valve closed
1/19/2012	8:31:16 PM	H2 valve closed
1/19/2012	8:31:16 PM	BCl3 valve closed
1/19/2012	8:31:16 PM	PH3 valve closed
1/19/2012	8:31:16 PM	SiCl4 pre valve closed
1/19/2012	8:31:16 PM	SiCl4 post valve closed
1/19/2012	8:31:16 PM	Bypass valve closed
1/19/2012	8:31:16 PM	Bubbler valve closed
1/19/2012	8:31:16 PM	Main Vac valve opened
1/19/2012	8:31:16 PM	Helium MFC set to  0.000000
1/19/2012	8:31:16 PM	H2 MFC set to  0.000000
1/19/2012	8:31:16 PM	BCl3 MFC set to  0.000000
1/19/2012	8:31:16 PM	PH3 MFC set to  0.000000
1/19/2012	8:31:16 PM	SiCl4 MFC set to  0.000000
1/19/2012	8:31:16 PM	Bypass solenoid MFC set to  0.000000
1/19/2012	8:31:16 PM	Tube furnace set to 0
1/19/2012	9:31:16 PM	Run finished at 9:31 PM
